Bronkhorst

EL-FLOW Prestige FG-200CVP (P-Insensitive)

고성능 가스 질량 흐름 컨트롤러

  • 정적 및 동적 압력 보정
  • On-board 가스 변환 가능 모델 (Multi-Fluid / Multi-Range)
  • 100여 가지의 고유 가스 정보 내장
  • 사용자 맞춤형 I/O 기능 구성
  • 상당한 전력 소비 감소
  • 흐름 - 신호 체계에서의 상당한 발전
  • 공정 변동에 거의 무관한 매우 안정적인 흐름 제어
  • 뛰어난 제어 밸브 디자인
Get a quote 다운로드 Datasheet
EL-FLOW PrestigeFG-200CVP (P-Insensitive)

Pressure Insensitive Gas Mass Flow Controllers for low flow rates

Bronkhorst® model FG-200CVP High Performance Mass Flow Controllers (MFCs) are suited for accurate measurement and control of flow ranges between 0,014…0,7 mln/min and 0,18…9 mln/min at operating pressures between vacuum and 10 bar(g). The MFC consists of a thermal mass flow sensor, a precise control valve and a microprocessor based pc-board with signal and fieldbus conversion. As a function of a setpoint value, the flow controller swiftly adjusts the desired flow rate. Model FG-200CVP is equipped with an on-board pressure sensor. In combination with an incorporated gas database with physical properties, the instrument automatically compensates for inlet pressure variations. As a result, the accuracy and control stability will not be affected by these pressure changes.

EL-FLOW® Prestige series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O. As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols. The EL-FLOW® Prestige design features standard Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.

thermal gas flow meter
More simple setup possible with EL-FLOW Prestige Pressure Insensitive (PI) model

기술 정보

Measurement / control system
Flow range (intermediate ranges available)min. 0,014…0,7 mln/min
max. 0,18…9 mln/min
(based on N2)
정확도 (선형도) (실제 검교정 기반)± 0,5 % RD plus ±0,1%FS
Repeatability< 0,2 % RD
Turndown ratio1:150 (1:50 in analog mode)
Multi Gas/Multi Rangeembedded gas data for 100 unique gases, plus any mixture of maximum 5 of these gases. MG/MR functionality available up to 64 bar.
Settling time (in control, typical)fast: < 500 msec
standard: < 1 sec
slow: < 2 sec
Control stability≤ ± 0,1 % FS (typical for 1 ln/min N2)
Operating temperature-10 … 70 °C
Temperature sensitivityzero: < 0,02% FS/°C; span: < 0,025% Rd/°
Pressure sensitivity< 0,02% Rd/bar typical N2
Max. Kv-value6,6 x 10-2
Leak integrity, outboardtested < 2 x 10-9 mbar l/s He
Attitude sensitivitymax. error at 90º off horizontal 0,07% FS at 1 bar, typical N2
Warm-up time30 min. for optimum accuracy
2 min. for accuracy ± 1% FS
Mechanical parts
Material (wetted parts)Stainless steel 316L or comparable, degreased for use on oxygen (O2)
Pressure rating (PN)10 bar g
Pressure sensorP-max: 15 bara; Burst pressure: 40 bara
Process connectionscompression type or face seal (VCR/VCO) couplings
Sealsstandard: FKM/Viton®
options: EPDM, FFKM/Kalrez®, FDA and USP Class VI approved compounds
valve seat: FFKM with PI film
Weight0,8 kg
Ingress protectionIP40
Electrical properties
Power supply+15 … 24 Vdc
Max. power consumption
Supply
15 V
24 V
at voltage I/O
202 mA
128 mA
at current I/O
225 mA
146 mA
extra for fieldbus
<75 mA
<50 mA

(based on normally closed valve, pin 5 not used)
아날로그 출력0…5 (10) Vdc or 0 (4)…20 mA (sourcing output)
Digital communicationstandard: RS232;
options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, FLOW-BUS
CertificationCE / UKCA
Electrical connection
아날로그/RS2329-pin D-connector (male);
PROFIBUS DPbus: 9-pin D-connector (female);
power: 9-pin D-connector (male);
CANopen® / DeviceNet™5-pin M12-connector (male);
FLOW-BUS/Modbus-RTU/ASCIIRJ45 modular jack
Modbus TCP / EtherNet/IP / POWERLINK2 x RJ45 modular jack (in/out);
EtherCAT®/ PROFINET2 x RJ45 modular jack (in/out)
IEC 61010-1IEC-61010-1:2010 including national deviations for UL (61010-1:2012) and CSA (C22.2 No. 61010-1-12)
Control valve options
External actuator options to be connected to the controller
Certification for hazardous areas
Approvals / certificates

Technical specifications subject to change without notice.

도면 및 배선연결 정보 제품 페이지 우리의 웹사이트

Downloads

Brochures
EL-FLOW Prestige brochure
Manuals
Quick installation guide
Manual EL-FLOW Prestige
Hook-up diagrams
Analog IO - RS232
DeviceNet
EtherCAT
FLOW-BUS
Modbus RTU/ASCII
PROFIBUS DP
PROFINET
CANopen
EtherNet/IP
Modbus-TCP
POWERLINK
Optional Bus and IO Configurations
Dimensional drawing
Dimensional Drawing FG-200CV - FG-210CV


BRONKHORST KOREA Co. Ltd

경기도 화성시 동탄순환대로 830 SK
V1 Center 209호
대표자 : 헨드리크제지너스타펠
사업자등록번호 : 119-86-74469

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